可控式机械密封设计

从机械密封的工作原理和失效分析入手,将自动控制技术引入机械密封,以改进机械密封的性能,使机械密封装置能够主动适应操作条件和工作环境的变化,提高其工作的可靠性和使用寿命,适用于要求较高的流体机械的轴端密封。     

机械合金化Fe-Ni粉末的相结构

使用XRD和Moessbauer等方法，研究了在Ar气氛下机械合金化Fe—Ni粉末相结构的变化．结果表明，在机械合金化Fe64-Ni36粉末过程中，fcc相的数量随着球磨时间的增加先增加然后减少，与加乙醇球磨Fe64-Ni36的情形相同．当Ni的含量(原子分数)大于50％时，有fcc相、顺磁相和FeNi3形成，当Ni的含量低于50％时，bcc相的数量随着Ni含量减少而增加．Moessbauer谱的结果表明，因球磨时间或Fe、Ni比例的不同，Fe—Ni球磨粉末固溶体具有不同结构的原子配比。     

CLBO晶体化学机械抛光技术的研究

介绍了硼酸锂铯(CLBO)晶体的应用前景及在化学机械抛光过程中存在的问题,简要分析了晶体在常温下开裂的机理,选用无水溶剂对晶体进行化学机械抛光以防止加工过程中晶体的潮解开裂。分析了抛光液、压力、温度、pH值参数对抛光过程的影响,通过合适配比使速率可达1.5～2μm/min,且表面质量较好。     

铝薄膜CMP影响因素分析

提出了在碱性抛光液中铝薄膜化学机械抛光的机理模型,对抛光液的pH值、磨料、氧化剂浓度对过程参数的影响做了一些试验分析。试验结果表面粗糙度的铝薄膜所需的最优化CMP过程参数:硅溶胶粒径为15～20nm,pH值为10.8～11.2,氧化剂浓度为2.5%～3%。     

罗茨真空泵主轴输入端动密封问题探讨

分析了罗茨真空泵轴封漏油的原因，介绍了提高轴封有效性的措施。     

电荷耦合器件积分时间对微型成像系统成像质量的影响

在光圈固定的情况下，确定合适的积分时间对于提高微型电荷耦合器件(CCD)成像系统的成像质量，增强微型飞行器的侦察能力具有十分重要的意义。本文讨论了决定CCD积分时间的各种因素，重点研究了适用于微型飞行器的CCD成像系统的积分时间与像移的关系，并进一步推导了计算像移量的相关数学模型。利用该模型对不同积分时间内采集的运动图像进行了像质评价，结果表明，在保证曝光量的前提下，当像移量被限制在1个像素内时，可以获得相对理想的运动图像像质。     

Characterization and optimization of copper chemical mechanical planarization

The feature scale planarization of the copper chemical mechanical planarization (CMP) process has been characterized for two copper processes using Hitachi 430-TU/Hitachi T605 and Cabot 5001/Arch Cu10K consumables. The first process is an example of an abrasive-free polish with a high-selectivity barrier slurry, while the second is an example of a conventional abrasive slurry with a low-selectivity barrier slurry. Copper fill planarization has been characterized for structures with conformal deposition as well as with bumps resulting from bottom-up fill. Dishing and erosion were characterized for several structures after clearing. The abrasive-free polish resulted in low sensitivity to overpolish and low saturation levels for dishing and erosion. Consequently, this demonstrated superior performance when compared to the International Technology Roadmap for Semiconductors (ITRS) 2000 roadmap targets for planarization. While the conventional slurry could achieve the 0.13-μm technology node requirements, the abrasive-free polish met the planarization requirements beyond the 0.10-μm technology node.     

低温高速离心泵的研制与应用

阐述了适合于输送低温介质的高速离心泵的水力设计和结构设计方法，结构上采有长，中，短叶片相间的复合叶轮及双密封结构，理论上采用以效率为目标函数的优化水力设计方法，保证了低温高速离心泵具有很好的工人可靠性和优越的性能指标。     

QUANTUM MECHANICAL MODEL AND SIMULATION OF GaAs/AlGaAs QUANTUM WELL INFRARED PHOTO- DETECTOR-Ⅰ OPTICAL ASPECTS

ＩｎｔｒｏｄｕｃｔｉｏｎＩｎｆｒａｒｅｄｄｅｔｅｃｔｏｒｔｅｃｈｎｉｑｕｅｈａｓｂｅｅｎａｋｅｙｆａｃｔｏｒｉｎｔｈｅｄｅｖｅｌｏｐｍｅｎｔｏｆｔｈｅｉｎｆｒａｒｅｄｔｅｃｈｎｏｌｏｇｙｆｏｒｍｏｒｅｔｈａｎ 4 0 ｙｅａｒｓ .Ｓｉｎｃｅ 1970 ,ｓｅｍｉｃｏｎｄｕｃｔｏｒｓｌｉｋｅＩｎＳｂａｎｄＨｇＣｄＴｅｈａｖｅｂｅｅｎｔｈｅｐｒｉｎｃｉｐａｌｍａｔｅｒｉａｌｓｆｏｒｖａｒｉｏｕｓｉｎｆｒａｒｅｄｄｅｔｅｃｔｏｒａｐｐｌｉｃａｔｉｏｎｓ .Ｔｈｅｆｏｒｍａｔｏｆｔｈｅｉｎｆｒａｒｅｄｄｅｔｅｃｔｏｒｍｏｔｉｖａｔｅｄｂｙｓｍａｒｔｔｈｅｒｍａｌｉｍａｇｉｎｇｓｙｓｔｅｍｃｈａｎｇｅｄｆｒｏｍｓｉｎｇｌｅｅｌｅｍｅｎｔｄｅｖｉｃｅｔｏｆｏｃａｌｐｌａｎａｒｒａｙｓ(ＦＰＡｓ)ｉｎｔｈｅｍｉｄｄｌｅｏｆ 80’ｓ [1].Ｔｏｄａｙ’ｓｔｅｃｈｎｏｌｏｇｙｏｆｉｎｆｒａｒｅｄｄｅｔｅｃｔｏｒｃｏｎｃｅｎｔｒａｔｅｓｌａｒｇｅｌｙｏｎｆｏｃａｌｐｌａｎａｒｒａｙｓ ,ｅｘｐｅｃｉａｌｌｙｆｏｒｓｅｎｓｉｔｉｖｅ ,ｈｏｍｏｇｅｎｅｏｕｓａｎｄｌａｒｇｅｆｏｒｍａｔｓｃａｌｅｄｅｖｉｃｅｓ .ＨｇＣｄＴｅ...     

Processing and microstructure of non-oxide ceramic fibres

Research and development efforts on high-temperature, oxidation-resistant fibres have increased over the past decade due to the demand for light-weight, stiff and strong composite materials in aerospace applications. Varieties of ‘high-performance’, continuous, non-oxide fibres with low-density, high tensile strength and tensile modulus have been developed either from organic precursors or via chemical vapour deposition for fabrication of ceramic matrix composites. Fibres derived from polymer precursors (e.g. Nicalon, Tyranno, HPZ) are small in diameter (compared to CVD monofilaments) and are ideally suited for ceramic composites. Processing, microstructural stability and mechanical properties of these newly developed SiC and Si₃N₄ base fibres are briefly reviewed in this paper.